The influence of oriented growth on the surface roughness of CVD diamond films

C. Nørgård; S. S. Eskildsen; A. Matthews

doi:10.1016/0257-8972(95)08241-7

The influence of oriented growth on the surface roughness of CVD diamond films

C. Nørgård^*, S. S. Eskildsen, A. Matthews

^*Corresponding author for this work

Materials Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

Experiments and computer simulations were carried out which indicate that very smooth diamond surfaces can be grown without any subsequent polishing of the diamond surface using a two-step deposition technique. The first step is to grow a diamond film under conditions that will establish a (100) textured diamond film. The second step is to decrease the surface roughness by increasing the growth rate of the inclined {111} planes of the (100) textured film.

Original language	English
Pages (from-to)	358-361
Number of pages	4
Journal	Surface and Coatings Technology
Volume	74-75
Issue number	Part1
DOIs	https://doi.org/10.1016/0257-8972(95)08241-7
Publication status	Published - Sept 1995

Keywords

Diamond
Friction
Hot filament CVD
Surface roughness
Textured growth

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10.1016/0257-8972(95)08241-7

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abstract = "Experiments and computer simulations were carried out which indicate that very smooth diamond surfaces can be grown without any subsequent polishing of the diamond surface using a two-step deposition technique. The first step is to grow a diamond film under conditions that will establish a (100) textured diamond film. The second step is to decrease the surface roughness by increasing the growth rate of the inclined {111} planes of the (100) textured film.",

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AU - Nørgård, C.

AU - Eskildsen, S. S.

AU - Matthews, A.

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N2 - Experiments and computer simulations were carried out which indicate that very smooth diamond surfaces can be grown without any subsequent polishing of the diamond surface using a two-step deposition technique. The first step is to grow a diamond film under conditions that will establish a (100) textured diamond film. The second step is to decrease the surface roughness by increasing the growth rate of the inclined {111} planes of the (100) textured film.

AB - Experiments and computer simulations were carried out which indicate that very smooth diamond surfaces can be grown without any subsequent polishing of the diamond surface using a two-step deposition technique. The first step is to grow a diamond film under conditions that will establish a (100) textured diamond film. The second step is to decrease the surface roughness by increasing the growth rate of the inclined {111} planes of the (100) textured film.

KW - Diamond

KW - Friction

KW - Hot filament CVD

KW - Surface roughness

KW - Textured growth

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JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - Part1

ER -

The influence of oriented growth on the surface roughness of CVD diamond films

Abstract

Keywords

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