The influence of oriented growth on the surface roughness of CVD diamond films

C. Nørgård, S. S. Eskildsen, A. Matthews

Research output: Contribution to journalArticlepeer-review

Abstract

Experiments and computer simulations were carried out which indicate that very smooth diamond surfaces can be grown without any subsequent polishing of the diamond surface using a two-step deposition technique. The first step is to grow a diamond film under conditions that will establish a (100) textured diamond film. The second step is to decrease the surface roughness by increasing the growth rate of the inclined {111} planes of the (100) textured film.

Original languageEnglish
Pages (from-to)358-361
Number of pages4
JournalSurface and Coatings Technology
Volume74-75
Issue numberPart1
DOIs
Publication statusPublished - Sept 1995

Keywords

  • Diamond
  • Friction
  • Hot filament CVD
  • Surface roughness
  • Textured growth

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