The optical and mechanical properties of carbon films grown using a fast atom beam source

A. Dehbi-Alaoui; A. Matthews; J. Franks

doi:10.1016/0257-8972(91)90345-W

The optical and mechanical properties of carbon films grown using a fast atom beam source

A. Dehbi-Alaoui^*, A. Matthews, J. Franks

^*Corresponding author for this work

Materials Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

The fast atom beam (FAB) source offers a convenient means of investigating the influence of process variables on diamond-like carbon film formation (e.g. gas composition, energy, flux and direction). Here we describe the optical properties of films produced using a FAB source, reporting for the first time the influence of sample orientation on these properties and in particular the result that fully transparent films can be produced by mounting the sample at grazing incidence to the beam.

Original language	English
Pages (from-to)	722-729
Number of pages	8
Journal	Surface and Coatings Technology
Volume	47
Issue number	1-3
DOIs	https://doi.org/10.1016/0257-8972(91)90345-W
Publication status	Published - 1 Jan 1991

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10.1016/0257-8972(91)90345-W

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abstract = "The fast atom beam (FAB) source offers a convenient means of investigating the influence of process variables on diamond-like carbon film formation (e.g. gas composition, energy, flux and direction). Here we describe the optical properties of films produced using a FAB source, reporting for the first time the influence of sample orientation on these properties and in particular the result that fully transparent films can be produced by mounting the sample at grazing incidence to the beam.",

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AU - Franks, J.

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AB - The fast atom beam (FAB) source offers a convenient means of investigating the influence of process variables on diamond-like carbon film formation (e.g. gas composition, energy, flux and direction). Here we describe the optical properties of films produced using a FAB source, reporting for the first time the influence of sample orientation on these properties and in particular the result that fully transparent films can be produced by mounting the sample at grazing incidence to the beam.

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The optical and mechanical properties of carbon films grown using a fast atom beam source

Abstract

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