The role of preoxidation on the interface structure of Co/MgO multilayers

David S. Eastwood, William F. Egelhoff, Brian K. Tanner

    Research output: Contribution to journalArticlepeer-review

    Abstract

    It has previously been reported that preoxidation of the bottom electrode prior to deposition of the Al2 O3 or MgO barrier in magnetic tunnel junctions acts to suppress orange-peel coupling between Co electrodes. Here, we present specular and diffuse X-ray scattering measurements from Co/MgO multilayer repeat structures which suggest that this drop arises from a reduction in the in-plane correlation length of the roughness at the electrode-barrier interface rather than reduction in roughness amplitude. © 2008 IEEE.
    Original languageEnglish
    Pages (from-to)3594-3596
    Number of pages2
    JournalIeee Transactions on Magnetics
    Volume44
    Issue number11
    Publication statusPublished - Nov 2008

    Keywords

    • Grazing incidence X-ray scattering
    • Multilayers
    • Orange-peel coupling
    • Preoxidation

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