The role of preoxidation on the interface structure of Co/MgO multilayers

David S. Eastwood, William F. Egelhoff, Brian K. Tanner

    Research output: Contribution to journalArticlepeer-review


    It has previously been reported that preoxidation of the bottom electrode prior to deposition of the Al2 O3 or MgO barrier in magnetic tunnel junctions acts to suppress orange-peel coupling between Co electrodes. Here, we present specular and diffuse X-ray scattering measurements from Co/MgO multilayer repeat structures which suggest that this drop arises from a reduction in the in-plane correlation length of the roughness at the electrode-barrier interface rather than reduction in roughness amplitude. © 2008 IEEE.
    Original languageEnglish
    Pages (from-to)3594-3596
    Number of pages2
    JournalIeee Transactions on Magnetics
    Issue number11
    Publication statusPublished - Nov 2008


    • Grazing incidence X-ray scattering
    • Multilayers
    • Orange-peel coupling
    • Preoxidation


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