The Snomipede: A Parallel Platform for Scanning Near-Field Photolithography

Ehtsham ul-Haq, Zhuming Liu, Yuan Zhang, Shahrul A Alang Ahmad, Lu Shin Wong, Jamie K Hobbs, Graham J Leggett, Jason Micklefield, Clive J Roberts, John M R Weaver, Clive R Roberts

    Research output: Contribution to journalArticlepeer-review

    Original languageEnglish
    Pages (from-to)2997-3008
    JournalJ. Mater. Res.
    Publication statusPublished - 2011

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