Thermal characterization of compact inductors and capacitors for 3D MMICs

L. Krishnamurthy; V. T. Vo; A. A. Rezazadeh

doi:10.1109/EUMC.2006.281179

Thermal characterization of compact inductors and capacitors for 3D MMICs

L. Krishnamurthy, V. T. Vo, A. A. Rezazadeh

Research output: Chapter in Book/Conference proceeding › Conference contribution

Abstract

Increasing utility of 3-D multilayer passive components in MMIC designs gives more flexibility with reduced cost and chip size. This also requires an in-depth analysis and characterization of these components over temperature and frequency. In this paper we present an experimental study of coplanar waveguide (CPW) based multilayer inductors and capacitors over a wide range frequency (45MHz to 40GHz) and temperature (25 to 200°C). All the structures are fabricated on GaAs semi-insulating substrate. The experimental results show that the inductance and capacitance value remains fairly constant over this temperature range. Also the resonant frequency of the compact 3-D inductor is constant over the entire temperature range. On the other hand Q factor of the inductor and capacitor decreases with increase in temperature. © 2006 EuMA.

Original language	English
Title of host publication	Proceedings of the 36th European Microwave Conference, EuMC 2006\|Proc. Eur. Microwave Conf. EuMC
Place of Publication	USA
Publisher	IEEE
Pages	52-55
Number of pages	3
ISBN (Print)	2960055160, 9782960055160
DOIs	https://doi.org/10.1109/EUMC.2006.281179
Publication status	Published - 2007
Event	36th European Microwave Conference, EuMC 2006 - Manchester Duration: 1 Jul 2007 → …

Conference

Conference	36th European Microwave Conference, EuMC 2006
City	Manchester
Period	1/07/07 → …

Keywords

Coplanar
Multilayer capacitor
Q factor
Resonant frequency
Spiral inductors

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10.1109/EUMC.2006.281179

Cite this

@inproceedings{126e709e8aec4f578b688d5d2b7c51ca,

title = "Thermal characterization of compact inductors and capacitors for 3D MMICs",

abstract = "Increasing utility of 3-D multilayer passive components in MMIC designs gives more flexibility with reduced cost and chip size. This also requires an in-depth analysis and characterization of these components over temperature and frequency. In this paper we present an experimental study of coplanar waveguide (CPW) based multilayer inductors and capacitors over a wide range frequency (45MHz to 40GHz) and temperature (25 to 200°C). All the structures are fabricated on GaAs semi-insulating substrate. The experimental results show that the inductance and capacitance value remains fairly constant over this temperature range. Also the resonant frequency of the compact 3-D inductor is constant over the entire temperature range. On the other hand Q factor of the inductor and capacitor decreases with increase in temperature. {\textcopyright} 2006 EuMA.",

keywords = "Coplanar, Multilayer capacitor, Q factor, Resonant frequency, Spiral inductors",

author = "L. Krishnamurthy and Vo, {V. T.} and Rezazadeh, {A. A.}",

note = "This paper is published in the IEEE Xplore This paper appears in: Microwave Conference, 2006. 36th European; 36th European Microwave Conference, EuMC 2006 ; Conference date: 01-07-2007",

year = "2007",

doi = "10.1109/EUMC.2006.281179",

language = "English",

isbn = "2960055160",

pages = "52--55",

booktitle = "Proceedings of the 36th European Microwave Conference, EuMC 2006|Proc. Eur. Microwave Conf. EuMC",

publisher = "IEEE",

address = "United States",

}

TY - GEN

T1 - Thermal characterization of compact inductors and capacitors for 3D MMICs

AU - Krishnamurthy, L.

AU - Vo, V. T.

AU - Rezazadeh, A. A.

N1 - This paper is published in the IEEE Xplore This paper appears in: Microwave Conference, 2006. 36th European

PY - 2007

Y1 - 2007

N2 - Increasing utility of 3-D multilayer passive components in MMIC designs gives more flexibility with reduced cost and chip size. This also requires an in-depth analysis and characterization of these components over temperature and frequency. In this paper we present an experimental study of coplanar waveguide (CPW) based multilayer inductors and capacitors over a wide range frequency (45MHz to 40GHz) and temperature (25 to 200°C). All the structures are fabricated on GaAs semi-insulating substrate. The experimental results show that the inductance and capacitance value remains fairly constant over this temperature range. Also the resonant frequency of the compact 3-D inductor is constant over the entire temperature range. On the other hand Q factor of the inductor and capacitor decreases with increase in temperature. © 2006 EuMA.

AB - Increasing utility of 3-D multilayer passive components in MMIC designs gives more flexibility with reduced cost and chip size. This also requires an in-depth analysis and characterization of these components over temperature and frequency. In this paper we present an experimental study of coplanar waveguide (CPW) based multilayer inductors and capacitors over a wide range frequency (45MHz to 40GHz) and temperature (25 to 200°C). All the structures are fabricated on GaAs semi-insulating substrate. The experimental results show that the inductance and capacitance value remains fairly constant over this temperature range. Also the resonant frequency of the compact 3-D inductor is constant over the entire temperature range. On the other hand Q factor of the inductor and capacitor decreases with increase in temperature. © 2006 EuMA.

KW - Coplanar

KW - Multilayer capacitor

KW - Q factor

KW - Resonant frequency

KW - Spiral inductors

U2 - 10.1109/EUMC.2006.281179

DO - 10.1109/EUMC.2006.281179

M3 - Conference contribution

SN - 2960055160

SN - 9782960055160

SP - 52

EP - 55

BT - Proceedings of the 36th European Microwave Conference, EuMC 2006|Proc. Eur. Microwave Conf. EuMC

PB - IEEE

CY - USA

T2 - 36th European Microwave Conference, EuMC 2006

Y2 - 1 July 2007

ER -

Thermal characterization of compact inductors and capacitors for 3D MMICs

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Keywords

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