Abstract
Deep level transient spectroscopy and ab-initio modeling have been used for identification of energy levels and structure of trivacancy (V3) in Si. It is found that in the neutral charge state the V3 is bistable, with the "fourfold" configuration being lower in energy than the (1 1 0) planar configuration. V3 in the (1 1 0) planar configuration gives rise to two acceptor levels at Ec-0.36 eV and Ec-0.46 eV in the gap, while in the "fourfold" configuration the defect has trigonal symmetry and an acceptor level at Ec-0.075 eV.
Original language | English |
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Pages (from-to) | 4565-4567 |
Number of pages | 3 |
Journal | Physica B: Condensed Matter |
Volume | 404 |
Issue number | 23-24 |
DOIs | |
Publication status | Published - 15 Dec 2009 |
Keywords
- Ab-initio modeling
- DLTS
- Energy levels
- Silicon
- Trivacancy