Abstract
State-of-the-art HBTs were designed, grown, fabricated and characterized in-house. The novelty of this process was the use of dimeric phosphorus generated from a Gallium Phosphide (GaP) decomposition source, which permitted growth at a fairly low temperature (42O°C) while conserving extremely high quality materials. A self- aligned ransistor with an emitter area of 5×5μm2 demonstrated a low offset voltage of 15OmV and high current gain of 90. An excellent agreement with the measured data was chieved using physical modelling pakages developed by SILVACO. © 2008 IEEE.
Original language | English |
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Title of host publication | ASDAM 2008 - Conference Proceedings of the 7th International Conference on Advanced Semiconductor Devices and Microsystems|ASDAM - Conf. Proc. Int. Conf. Adv. Semicond. Dev. Microsystems |
Pages | 271-274 |
Number of pages | 3 |
DOIs | |
Publication status | Published - 2008 |
Event | 7th International Conference on Advanced Semiconductor Devices and Microsystems, ASDAM 2008 - Smolenice Duration: 1 Jul 2008 → … http://<Go to ISI>://000263223200047 |
Conference
Conference | 7th International Conference on Advanced Semiconductor Devices and Microsystems, ASDAM 2008 |
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City | Smolenice |
Period | 1/07/08 → … |
Internet address |