Unique structure/properties of chemical vapor deposited parylene E

Jay J. Senkevich; Christopher J. Mitchell; Aravind Vijayaraghavan; Edward V. Barnat; John F. McDonald; Toh Ming Lu

doi:10.1116/1.1487870

Unique structure/properties of chemical vapor deposited parylene E

Jay J. Senkevich, Christopher J. Mitchell, Aravind Vijayaraghavan, Edward V. Barnat, John F. McDonald, Toh Ming Lu

Research output: Contribution to journal › Article › peer-review

Abstract

The structure and properties of parylene E, composed of ∼69% diethylated, ≃25% monoethylated, and ≃6% hydrocarbon poly(p-xylylene), were studied. Unique structure and properties were explored as compared to the common parylene polymers such as parylene N (hydrocarbon parylene), C (monochloro parylene), and D (dichloro parylene). The resulting data was analyzed in detail.

Original language	English
Pages (from-to)	1445-1449
Number of pages	4
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	20
Issue number	4
DOIs	https://doi.org/10.1116/1.1487870
Publication status	Published - Jul 2002

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abstract = "The structure and properties of parylene E, composed of ∼69% diethylated, ≃25% monoethylated, and ≃6% hydrocarbon poly(p-xylylene), were studied. Unique structure and properties were explored as compared to the common parylene polymers such as parylene N (hydrocarbon parylene), C (monochloro parylene), and D (dichloro parylene). The resulting data was analyzed in detail.",

author = "Senkevich, {Jay J.} and Mitchell, {Christopher J.} and Aravind Vijayaraghavan and Barnat, {Edward V.} and McDonald, {John F.} and Lu, {Toh Ming}",

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AU - Mitchell, Christopher J.

AU - Vijayaraghavan, Aravind

AU - Barnat, Edward V.

AU - McDonald, John F.

AU - Lu, Toh Ming

PY - 2002/7

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AB - The structure and properties of parylene E, composed of ∼69% diethylated, ≃25% monoethylated, and ≃6% hydrocarbon poly(p-xylylene), were studied. Unique structure and properties were explored as compared to the common parylene polymers such as parylene N (hydrocarbon parylene), C (monochloro parylene), and D (dichloro parylene). The resulting data was analyzed in detail.

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DO - 10.1116/1.1487870

M3 - Article

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VL - 20

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JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

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Unique structure/properties of chemical vapor deposited parylene E

Abstract

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