X-Ray Absorption Correction for Quantitative Scanning Transmission Electron Microscopic Energy-Dispersive X-Ray Spectroscopy of Spherical Nanoparticles

Thomas Slater, Yiqiang Chen, Gregory Auton, Nestor Zaluzec, Sarah Haigh

Research output: Contribution to journalArticlepeer-review

Abstract

A new method to perform X-ray absorption correction for spherical particles in quantitative energy-dispersive X-ray spectroscopy in the scanning transmission electron microscope is presented. An absorption correction factor is derived and simulated data is presented encompassing a range of X-ray absorption conditions. Theoretical calculations are compared with experimental data of X-ray counts from Au nanoparticles to verify the derived methodology. The effect of detector elevation angle is considered and a comparison with thin-film absorption correction is included.

Original languageEnglish
Pages (from-to)440-447
Number of pages8
JournalMicroscopy and Microanalysis
Volume22
Issue number2
DOIs
Publication statusPublished - 1 Apr 2016

Keywords

  • absorption correction
  • nanoparticles
  • quantification
  • STEM
  • XEDS

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