Abstract
A new method to perform X-ray absorption correction for spherical particles in quantitative energy-dispersive X-ray spectroscopy in the scanning transmission electron microscope is presented. An absorption correction factor is derived and simulated data is presented encompassing a range of X-ray absorption conditions. Theoretical calculations are compared with experimental data of X-ray counts from Au nanoparticles to verify the derived methodology. The effect of detector elevation angle is considered and a comparison with thin-film absorption correction is included.
Original language | English |
---|---|
Pages (from-to) | 440-447 |
Number of pages | 8 |
Journal | Microscopy and Microanalysis |
Volume | 22 |
Issue number | 2 |
DOIs | |
Publication status | Published - 1 Apr 2016 |
Keywords
- absorption correction
- nanoparticles
- quantification
- STEM
- XEDS