Xe+ Plasma FIB: 3D Microstructures from Nanometers to Hundreds of Micrometers

Timothy Burnett, Bartlomiej Winiarski, R Kelley, Xiang Li Zhong, I. N. Boona, D. W. McComb, K Mani, M. Grace Burke, Philip Withers

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    Xenon plasma focused ion beam (FIB) technology has the potential to investigate large volumes, hundreds of micrometers in size whilst retaining the high resolution of SEM imaging. Three different materials, an aluminum alloy, a zirconium-based metallic glass, and a tungsten carbide-cobalt hard metal, were subject to serial sectioning to build up 3D microstructural images. Lastly a sample of human dentine was shaped into a pillar for analysis using nanoscale X-ray CT. The plasma FIB broadens the range of length scales, which can be investigated and holds significant promise for bringing new understanding of complex microstructures
    Original languageEnglish
    Pages (from-to)32-37
    Number of pages6
    JournalMicroscopy Today
    Issue number3
    Early online date28 Apr 2016
    Publication statusPublished - May 2016


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