Xe+ Plasma FIB: 3D Microstructures from Nanometers to Hundreds of Micrometers

Timothy Burnett; Bartlomiej Winiarski; R Kelley; Xiang Li Zhong; I. N. Boona; D. W. McComb; K Mani; M. Grace Burke; Philip Withers

doi:10.1017/S1551929516000316

Xe⁺ Plasma FIB: 3D Microstructures from Nanometers to Hundreds of Micrometers

Timothy Burnett, Bartlomiej Winiarski, R Kelley, Xiang Li Zhong, I. N. Boona, D. W. McComb, K Mani, M. Grace Burke, Philip Withers

Research output: Contribution to journal › Article › peer-review

238 Downloads (Pure)

Abstract

Xenon plasma focused ion beam (FIB) technology has the potential to investigate large volumes, hundreds of micrometers in size whilst retaining the high resolution of SEM imaging. Three different materials, an aluminum alloy, a zirconium-based metallic glass, and a tungsten carbide-cobalt hard metal, were subject to serial sectioning to build up 3D microstructural images. Lastly a sample of human dentine was shaped into a pillar for analysis using nanoscale X-ray CT. The plasma FIB broadens the range of length scales, which can be investigated and holds significant promise for bringing new understanding of complex microstructures

Original language	English
Pages (from-to)	32-37
Number of pages	6
Journal	Microscopy Today
Volume	24
Issue number	3
Early online date	28 Apr 2016
DOIs	https://doi.org/10.1017/S1551929516000316
Publication status	Published - May 2016

Access to Document

10.1017/S1551929516000316

BurnettPFIB2015_final3_CELAccepted author manuscript, 480 KB

Next Generation Multi-Dimensional X-ray Imaging
Withers, P. (PI), Burke, G. (CoI), Cernik, R. (CoI), Haigh, S. (CoI), Lee, P. (CoI) & Lionheart, W. (CoI)
1/02/15 → 31/01/20
Project: Research
XRADIA : High Resolution of 4D Imaging of Degradation and Self-repair Processes
Withers, P. (PI), Bailey, C. (CoI) & Lee, P. (CoI)
1/04/12 → 31/03/22
Project: Research

Cite this

@article{e8c1b52084d74b6a8a95b14a2d5ca7cb,

title = "Xe+ Plasma FIB: 3D Microstructures from Nanometers to Hundreds of Micrometers",

abstract = "Xenon plasma focused ion beam (FIB) technology has the potential to investigate large volumes, hundreds of micrometers in size whilst retaining the high resolution of SEM imaging. Three different materials, an aluminum alloy, a zirconium-based metallic glass, and a tungsten carbide-cobalt hard metal, were subject to serial sectioning to build up 3D microstructural images. Lastly a sample of human dentine was shaped into a pillar for analysis using nanoscale X-ray CT. The plasma FIB broadens the range of length scales, which can be investigated and holds significant promise for bringing new understanding of complex microstructures",

author = "Timothy Burnett and Bartlomiej Winiarski and R Kelley and Zhong, {Xiang Li} and Boona, {I. N.} and McComb, {D. W.} and K Mani and Burke, {M. Grace} and Philip Withers",

year = "2016",

month = may,

doi = "10.1017/S1551929516000316",

language = "English",

volume = "24",

pages = "32--37",

journal = "Microscopy Today",

publisher = "Cambridge University Press",

number = "3",

}

TY - JOUR

T1 - Xe+ Plasma FIB: 3D Microstructures from Nanometers to Hundreds of Micrometers

AU - Burnett, Timothy

AU - Winiarski, Bartlomiej

AU - Kelley, R

AU - Zhong, Xiang Li

AU - Boona, I. N.

AU - McComb, D. W.

AU - Mani, K

AU - Burke, M. Grace

AU - Withers, Philip

PY - 2016/5

Y1 - 2016/5

N2 - Xenon plasma focused ion beam (FIB) technology has the potential to investigate large volumes, hundreds of micrometers in size whilst retaining the high resolution of SEM imaging. Three different materials, an aluminum alloy, a zirconium-based metallic glass, and a tungsten carbide-cobalt hard metal, were subject to serial sectioning to build up 3D microstructural images. Lastly a sample of human dentine was shaped into a pillar for analysis using nanoscale X-ray CT. The plasma FIB broadens the range of length scales, which can be investigated and holds significant promise for bringing new understanding of complex microstructures

AB - Xenon plasma focused ion beam (FIB) technology has the potential to investigate large volumes, hundreds of micrometers in size whilst retaining the high resolution of SEM imaging. Three different materials, an aluminum alloy, a zirconium-based metallic glass, and a tungsten carbide-cobalt hard metal, were subject to serial sectioning to build up 3D microstructural images. Lastly a sample of human dentine was shaped into a pillar for analysis using nanoscale X-ray CT. The plasma FIB broadens the range of length scales, which can be investigated and holds significant promise for bringing new understanding of complex microstructures

U2 - 10.1017/S1551929516000316

DO - 10.1017/S1551929516000316

M3 - Article

VL - 24

SP - 32

EP - 37

JO - Microscopy Today

JF - Microscopy Today

IS - 3

ER -

Xe+ Plasma FIB: 3D Microstructures from Nanometers to Hundreds of Micrometers

Abstract

Access to Document

Fingerprint

Projects

Next Generation Multi-Dimensional X-ray Imaging

XRADIA : High Resolution of 4D Imaging of Degradation and Self-repair Processes

Cite this

Xe⁺ Plasma FIB: 3D Microstructures from Nanometers to Hundreds of Micrometers