@inproceedings{5890abe02b66428f8f44bc5b5ca30f0b,
title = "ZnO based SAW and FBAR devices for lab-on-a chip applications",
abstract = "Acoustic wave devices were fabricated incorporating ZnO films deposited using both a standard rf magnetronand a novel High Target Utilisation (HiTUS) Sputtering System. Our results demonstrated the feasibility of using a single SAW-based actuation mechanism for both microfluidics and sensing. To further improve the sensitivity of our bio-sensors we have also investigated the use of Thin Film Bulk Acoustic Resonators.",
author = "Milne, {W. I.} and Fu, {Y. Q.} and Luis Garcia-Gancedo and Greg Ashley and Luo, {J. K.} and Kirby, {P. B.} and X. Zhao and Lu, {J. R.} and Flewitt, {A. J.}",
year = "2012",
month = oct,
language = "English",
isbn = "9781622761906",
volume = "2",
series = "Proceedings of the International Display Workshops",
publisher = "Society for Information Display",
pages = "1149--1152",
booktitle = "18th International Display Workshops 2011 (IDW'11)",
address = "United States",
note = "18th International Display Workshops 2011, IDW 2011 ; Conference date: 07-12-2011 Through 09-12-2011",
}