Assessing Lamellae Thickness During FIB Milling with Monte Carlo Modelling

Student thesis: Master of Philosophy

Abstract

The dual-beam focussed ion beam (FIB) scanning electron microscope (SEM) is a flexible instrument used to prepare site-specific transmission electron microscopy (TEM) specimens. An accurately and sufficiently thinned TEM lamella is crucial to optimising image resolution and spectroscopic data acquisition. TEM methods such as electron energy loss spectroscopy (EELS) can be used to measure lamella thickness through comparative integration analysis of the transmitted and zero-loss energy peak [1-4]. However, severe challenges lie in the preparation of sufficiently thin samples ("
Date of Award4 Sept 2019
Original languageEnglish
Awarding Institution
  • The University of Manchester

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